Femtosecond laser processing of semiconductor
نویسندگان
چکیده
منابع مشابه
Femtosecond Laser Processing of Nitinol
The effects of femtosecond laser machining on surface characteristics and subsurface microstructure of a Nitinol alloy were studied. The femtosecond laser machining produced an average surface roughness of 0.2 μm. A re-deposited layer of 7 μm and a hardened layer of 70 μm were also resulted from the machining.
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ژورنال
عنوان ژورنال: The Review of Laser Engineering
سال: 2007
ISSN: 0387-0200,1349-6603
DOI: 10.2184/lsj.35.107